Nanopositioners and AFM for SEM

PicoTech offers Nano positioners and Nano probers by Imina Technologies for Scanning Electron Microscopes (SEM) as well as AFM in SEM add-on by Nenovision for Scanning Electron Microscopes (SEM). Several product lines are available to suit different applications.

 

NANO product line
Integrated nanoprobing solutions for your SEM, FIB and dual beam. Perform electrical characterization of microelectronic devices, in situ semiconductor failure analysis and manipulation of single structures under electron microscopes.

Semiconductor Nanoprobing Solutions for Electron Microscopes
Up to 8 MiBot™ nanoprobes can be delivered in various configurations and options to adapt to your specific application requirements and microscopy equipment. The compact and light platforms for the robots are compatible with any electron microscope and can either be mounted on the SEM sample positioning stage, or be loaded via the SEM load-lock.

AFM in SEM for 2D samples
AFM-in-SEM allows analysis by AFM (16 measurement modalities) and SEM, enabling complex surface characterization under in-situ vacuum conditions.

• Topography and height profiling (AFM)
• Mechanical properties (Phase imaging)
• Electrical properties (C-AFM, KPFM)
• Magnetic properties (MFM)
• Chemical composition (EDX, SEM)