PicoTech offers a variety of optical measurement tools including Optical Reflectometers and Spectroscopic Ellipsometers. Manual, semi-automatic and automatic versions of the machines are presented in this section. Substrate mapping and other automation options are available for sample sizes starting from pieces and up to 300mm wafers.

Typical applications are:

Thin film Thickness Measurements and mapping, Material Optical Properties measurements, Photoresist Thickness measurements, Porosimetry.

Non-contact and non-destructive optical measurements on substrates, single layer and multi-layer samples to obtain individual thin film thickness and optical properties.