PicoTech offers a wide range of Wafer Load-Locks and Wafer Transfer Systems by Hine Automation. Both atmospheric and vacuum systems are presented in this section.
Single Substrate Vacuum Transfer Systems, Single Wafer Load-Locks.
Hine’s Star Systems are automated load locks designed to eliminate the need to vent and evacuate the OEMs process chamber prior to every process cycle. Hine’s Star Systems offer various levels of functionality and integration that meet technical and budgetary requirements of most OEM applications including Atomic Layer Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Metal and Oxide Etch, MR Head Deposition, MEMS, and compound semiconductor applications.
