Classic Spectroscopic Ellipsometers

PicoTech offers a wide range of Classic Spectroscopic Ellipsometers by Semilab.

Semilab’s Classic Spectroscopic Ellipsometer features the widest spectral range available on a single tool. The ranging is from the deep UV (190 nm) up to mid-IR (25 μm). Full motorization is available on Classic Spectroscopic Ellipsometer platform.

R&D table-top Spectroscopic Ellipsometers perform non-contact and non-destructive optical measurements on substrates, single layer and multi-layer samples to obtain individual thin film thickness and optical properties.

 

Main measurement modes:

  • Spectroscopic Ellipsometry for thin film thickness and optical functions, including complex multilayer structures
  • Generalized Ellipsometry for anisotropic materials
  • Transmission Ellipsometry for transparent substrates
  • Scatterometry vs. wavelength and angle of incidence
  • Mueller Matrix (11 or 16 elements) uniquely offered in combination with Scatterometry for 3D anisotropic materials
  • Jones Matrix for simple anisotropic materials