
Home » Thin Film Deposition » Sputter, Thermal, E-beam Evaporation, IBD, ALD, DLC, Precision Optics, In Bumps
PicoTech offers a full range of tools for Physical Vapor Deposition (PVD). These systems are related to the Semiconductor, Nano-Fabrication, Photonics, Optoelectronics, Wireless, Power Devices, Advanced Packaging, MEMS, Biomedical, general R&D and other markets.
The list of technologies includes: Magnetron Sputtering, Plasma Assisted Magnetron Sputtering (PARMS), Thermal Evaporation, Electron Beam (e-beam) Evaporation, Ion Beam Deposition (IBD), Atomic Layer Deposition (ALD), Diamond Like Carbon coating (DLC), coatings for Precision Optics, Indium Bumps formation. A variety of PVD systems allows to cover all PVD related tasks on every level starting from R&D up to full-scale automatic manufacturing.
Typical applications are:
Sputtering and Evaporation of Metals, Dielectrics and other materials, different coatings including Precision Coatings for Optics, Indium Bumps formation, advanced ALD and Diamond Like Carbon (DLC) coatings, Protective Coatings, Functional Layers. Manual and semi-auto PVD Systems can accommodate substrate sizes from small pieces up to 300mm. Substrates can be handled one by one or in batches.