Plasma Equipment

PicoTech offers a full range of equipment in the field of Plasma and Plasma-Chemical Treatment for Semiconductor, PCB, R&D, General Electronics, Biomedical, Automotive and other industries. The portfolio of machines includes manual, semi-automatic and fully automatic tools for R&D and production purposes. Machines can accommodate samples from small pieces up to 300mm wafers.

 

The list of technologies includes:

Atmospheric Plasma Cleaning, Vacuum Plasma Cleaning, Plasma Surface Activation, Plasma Surface Modification, Plasma Dry Etch, Reactive Ion Etching (RIE), Plasma Etching with Inductively Coupled Plasma (ICP), Deep Silicon Etching (DSE), Mask Etching, Ion Beam Etching (IBE), Plasma Enhanced Chemical Vapor Deposition (PECVD).