Diffusion Furnaces and LPCVD

PicoTech offers a full range of Diffusion Furnaces for many different applications. Both compact R&D furnaces and production scale furnaces are presented in this section. Manual, semi-automatic and fully automated Diffusion Furnaces can accommodate sample sizes from small pieces up to 300mm. Both Horizontal and Vertical Diffusion Furnaces are presented in this section.

 

Typical applications are:

Atmospheric and Vacuum Annealing, Annealing of Dopants, Dry and Wet Oxidation, different Nitride Coatings, Atmospheric and Low-Pressure Chemical Vapor Deposition (LPCVD), TEOS.