PicoTech offers a full range of Rapid Thermal Processing and Rapid Thermal Annealing tools. Both vacuum and inert gas environment processes are presented in this section. Compact and easy to use, RTP systems are cost effective solution for thermal processing tasks in semiconductor and R&D industries.

Typical applications are:

Rapid Thermal Processing (RTP), Rapid Thermal Annealing (RTA), Atmospheric and Vacuum Annealing, Post-Implant Annealing, Growth of Oxide and Nitride films, Formation of Silicides, Salicides, and Metal Alloys, General Thermal Processing, Reflow, Activation of Getter. Manual, semi-automatic and fully automatic RTP Systems can accommodate sample sizes from small pieces up to 300mm.