Thermal Processing Equipment

PicoTech offers a full range of equipment in the field of Thermal Processing for the Semiconductor, R&D, General Electronics and other industries. The portfolio of machines includes manual, semi-automatic and fully automatic tools for R&D and Production purposes. Machines can accommodate samples from small pieces up to 300mm wafers.

 

The list of technologies includes:

Rapid Thermal Processing and Annealing (RTP and RTA), Vacuum Reflow with flux or fluxless, Diffusion Processes, Atmospheric and Vacuum Annealing, Post-Implant Annealing, Growth of Oxide and Nitride films, Formation of Silicides, Salicides, and Metal Alloys, Low-Pressure Chemical Vapor Deposition (LPCVD).