PicoTech offers a wide range of Porosimetry and Near Infra-Red (NIR) Ellipsometers by Semilab.
Semilab’s Classic Spectroscopic Ellipsometer features the widest spectral range available on a single tool. The ranging is from the deep UV (190 nm) up to mid-IR (25 μm). Full motorization is available on Classic Spectroscopic Ellipsometer platform.
Classic Spectroscopic Ellipsometer is uniquely offered with an optional FTIR ellipsometer head on the same goniometer with the visible arms. It can be configured with the fast detection mode by using spectrograph and detector array, with the high resolution mode by using spectrometer and single point detectors, or with both modes together on the same tool.
Additional options and measurement modes:
- Reflectance & Transmittance vs. wavelength and incidence angle
- Polarimetry
- Porosimetry: Measurements of pore size and porosity in thin films
- In situ measurement mode for real time control during deposition or etch process
