Microscope Based Laser Vibrometers

Optical characterization of dynamics inside Si-capped MEMS

Dynamic characterization of MEMS devices to measure and visualize mechanical response is important for product development, trouble shooting and FE model validation. The MSA Micro System Analyzers from Polytec provide fast, accurate optical measurements of out-of-plane (OOP) and in-plane motion (IP). Until now, this has been limited to unpacked devices that are optically accessible. Now, the Polytec MSA-650 IRIS Micro System Analyzer allows even measuring through intact silicon caps on encapsulated microstructures like e.g. inertial sensors, MEMS microphones, pressure sensors and more.

Measuring dynamic response and topography of MEMS and microstructures

Surface topography and dynamic motion analysis and visualization are key to testing and developing microstructures such as MEMS devices (Micro-Electro-Mechanical Systems). They are indispensable for validating FE calculations, determining cross-talk effects and measuring surface deformation. The MSA-600 Micro System Analyzer is the all-in-one optical measurement workstation for characterizing surface topography as well as in-plane and out-of-plane motions.
The versions MSA-600-M/V cover frequency ranges up to 25 MHz, ideally suited for MEMS, MEMS microphones and other microsystems. The versions MSA-600-X/U cover the high and very high frequency range up to 2.5 GHz, perfect for the assessment of HF MEMS resonators, micro-acoustic devices like SAW, BAW and more.
PREMIERE:
The MSA-600-S is the specialized optical measurement workstation designed for 6 GHz real-time vibration analysis and surface topography analysis. Ideal for testing GHz MEMS like FBAR (film bulk acoustic resonators), BAW (bulk acoustic wave) filters and SAW (surface acoustic wave) devices

3D vibration measurement for MEMS and microsystems

Real objects’ vibrations are usually three-dimensional. While you can indeed show preferential directions, production tolerances and other influences lead to movement components in other spatial directions too. You can use the MSA-100-3D Micro System Analyzer to analyze your sample’s dynamic behaviour in an integrated way, over a wide bandwidth and in real time. The vibration components in all three spatial directions are recorded simultaneously in high resolution and are analyzed as an integrated data record. You achieve the sub-picometer amplitude resolution typical of laser vibrometers regardless of the direction of vibration.

Full-field vibration measurement on small parts & microstructures

The MSA-060 Micro System Analyzer is a compact optical measurement system for the comprehensive assessment of the vibrational behavior of MEMS and microsystems, dynamics of precision mechanics and reliability of electronics. This entry-level solution helps identify resonance frequencies, vibration amplitudes and even visualizes operational deflection shapes on entire samples.
The MSA-060 is designed for full-field and non-contact vibration analysis, capturing true vibration dynamics from very small and delicate to meso-scale test structures. The powerful data acquisition VibSoft-PRO offers reference channel plus signal generator. The optional xy-stage allows for scanning entire sample surfaces, providing real-time vibration data with picometer resolution on an extended bandwidth from DC to 24 MHz.