PicoTech offers Deep Level Transient Spectroscopy (DLTS) Measurement System by Semilab for contamination analysis in the area of semiconductors.
Deep Level Transient Spectroscopy
The Deep Level Transient Spectroscopy (DLTS) is a powerful technology for the detection and identification of electrically active defects (known as traps) in semiconductors. These can occur due to contamination or crystal defects.
It is an extremely versatile method for determining all parameters associated with deep traps, including energy level, capturing cross section and concentration distribution. It allows the identification of the impurities and is capable of detecting contamination concentrations below 5×107 atoms/cm3.
DLTS is a destructive technique, as it requires the forming of either a Schottky-diode, or a p-n junction with a small sample, usually cut from a complete wafer.
