Semi-Automatic Photoresist Coating and Developing

PicoTech offers a wide range of Semi-Automatic Photoresist Coating and Developing tools by Suss MicroTec.

SUSS MicroTec’s Semi-Automatic Photoresist Coating and Developing tools are suitable for R&D and small-scale production and can be custom configured for each application. Supported wafer sizes are up to 200mm. The design of Semi-Auto Photoresist Coating and Developing tools allows easy transfer of the technology process to full scale production with top application quality, reliability and repeat accuracy.

 

Typical applications are:

Photoresist Coating, Photoresist Developing (puddle or spray).