PicoTech offers a wide range of Semi-Automatic Wet Tools for Developing, Lift-Off and Cleaning by Suss MicroTec.
SUSS MicroTec’s Semi-Automatic wet-processing systems offer superior cleaning and lift-off functions for solvent media applications as well as for aqueous media applications. The single-wafer processing platform serves pieces, wafer sizes up to 300 mm, square substrates up to 230 x 230 mm and tape frames for wafers up to 300 mm. Its ability to handle various media and processes gives the flexibility needed for switching between applications and makes the tool the first choice for research environment and small scale production.
A wide range of processes can be run: from a simple puddle or spray development to lift-off that requires, besides puddle dispense for soaking and final rinse, a high-pressure to lift off the resist and the metal. Special applications such as cleaning of adhesives from wafers mounted on tape frame that may require the support of a mega-sonic transducer for optimal cleaning results can also be performed.
