PicoTech offers HVS series High Vacuum Sealers by UniTemp for sealing of MEMS-Packagings under high vacuum with a getter activation technology available. Two models are presented in this section: 2Z HVS-100 and 2Z HVS-200 with the main difference of chamber size for component 100mm/200mm accordingly.
High Vacuum Sealers are made for sealing of MEMS-Packagings under high vacuum (up to 10-6 hPa) with high reliability hermetically sealing. The electronic component can be processed before sealing in several heating zones with different temperatures up to 450 °C. This allows also the getter activation. The ramp up rate is significant with 35 K/min in vacuum. A key feature is the automatical positioning and sealing of the parts, whereas both parts must have the same temperature. The control of different heat-up ramp rates and/or ramp-down rates is very important task which was solved sucessfully in HVS vacuum sealers.
