PicoTech offers a wide range of Semi-Automatic Mask Cleaners by Suss Microtec for R&D and pilot production use.
Typical applications are:
Mask cleaners are designed to address the needs of customers in the semiconductor industry requiring high quality substrate processing for photomask applications as well as opto-electronics, OLED, and special semiconductor back-end (MEMS) applications. It offers develop, etch and cleaning functionalites.
Semi-Auto Mask Cleaners enable processing of small series or pilot production of special substrates. These cleaners combine stability and reliability of the proven performance with today’s needs for electronic control functions, implementation of new cleaning techniques and environmental and safety requirements.
