Spray Acid Tools

PicoTech offers a wide range of semi-automated Spray Acid Tools (SAT) for R&D, lab use and for production purposes. Semi-auto and fully automated Spray Acid Tools can accommodate sample sizes typically from 50mm up to 300mm.

Typical applications are:

Spray Acid Technology. Post-Etch Clean, Pre-Diffusion Clean, Post-CMP Clean, Post-Ash Clean, UBM Etch, Metal Etch, BOE Etch, Oxide Etch, GaAs Etch & Clean, Cu Etch, RDL Etch, Glass Etch, Wafer Thinning, Si Etch.