PicoTech offers a wide range of fully automated Wet Benches for production purposes and advanced R&D laboratory use: Wet Processing, Wet Cleaning, Wet Etching, Electroplating and many others.
Fully automated Wet Benches are typically used by production and pilot production facilities where the process recipe is developed and needs to be continuously repeated by the tool. Fully automated operation allows user to achieve a very high throughput together with a very high repeatability of the process parameters. Wafers are typically processed in cassettes. Fully-auto wet benches can accommodate sample sizes typically from 100mm and up to 300mm.
Typical applications are:
Wet Cleaning, Electroplating, Wet Etching, Lift-Off, Drying, Spin Rinse Drying (SRD) and many others.
