Manual HF VPE Etchers for MEMS Release

PicoTech offers manual Hydrofluoric Acid Vapor Phase Etchers for MEMS Release for R&D and laboratory use.

Manual HF VPE etchers can be equipped with mechanical and electrostatic chucks to work with all sizes and shapes of chips.

HF vapor enables stiction-free release of microelectromechanical systems (MEMS) by thermally-controlled etching of the silicon dioxide layer.

Typical applications are:

MEMS Release, etching in Hydrofluoric Acid Vapor.