MOCVD for LED Production

PicoTech offers a wide range of MOCVD tools for LED Production by Veeco.

Veeco’s EPIK® 868 is the LED industry’s highest performance MOCVD system that enables superior uniformity and repeatability with low defectivity. Available in a four-reactor configurations, EPIK 868 features breakthrough technologies including the proprietary IsoFlange™ and TruHeat™ technologies that provide laminar flow and uniform temperature profile across the entire wafer carrier. These technological innovations drive higher yields required for mini and micro LEDs.